Sulfur hexafluoride SF6

sulphur hexafluoride sf6 Specifications 1.Grade:99.9%-99.999% 2. usage:Electronics equipment,transformer,refrigerating fluid

Sulfur Hexafluoride  (SF6)

It is a colorless, tasteless, odorless, non-toxic, non- burning gas with very good stability, heat resistance, excellent electrical insulation and arcing characteristics.

With excellent electric in sulating and arc-quenching  capacity,SF6 has been widely used in the fields of power installations,laser,medicine,meteorology,refrigeration,fire-fighting,chenical industry,military engineering,aerospace,nonferrous metallurgy and physical research etc.

Electronic SF6 is widely used in TFT-LCD,semiconductor and solar photoelectricity industy ect.

It is a good cleaning gas and etching gas for plasma process.

---------------------------------------------PURITY                                      99.99%                  99.999%     Nitrogen                                     < 20 ppm               < 5 ppmOxygen                                     < 10 ppm                < 3 ppmTotal Hydrocarbons (as CH4) < 5 ppm                 < 1 ppmHalocaron 14                           < 60 ppm                < 5 ppmWater                                        < 5 ppm                 < 3 ppmHydrogen Fluoride                  < 0.1 ppm               < 0.1 ppm Valve Material                      Brass                        Brass

---------------------------------------------Molecular Weight:   146.05Specific Volume:     2.65 cf/lb @NTPBoiling Point:          -82.7 °F@ 1 AtmCAS No.:                2551-62-4Hazards:                 SuffocationSafety Data:ACGIH - TLV:             1,000 ppmVapor Pressure Data:Temp, Deg.F    Pressure,psia32                      184.470                       320

Sulfur hexafluoride SF6