- Contact Person : Mr. Lai Long
- Company Name : Zhuhai Xinhong Electronic Chemical Material Co., Ltd.
- Tel : 86-0756-2125189
- Fax : 86-0756-2125316
- Address : Guangdong,Zhuhai,Room 509, Kehui Building, No. 63, Zijing Road, Xiangzhou District
- Country/Region : China
Sulfur hexafluoride SF6 gas SF6 gas
SF6 gas
Sulfur Hexafluoride (SF6)
It is a colorless, tasteless, odorless, non-toxic, non- burning gas with very good stability, heat resistance, excellent electrical insulation and arcing characteristics.
With excellent electric in sulating and arc-quenching capacity,SF6 has been widely used in the fields of power installations,laser,medicine,meteorology,refrigeration,fire-fighting,chenical industry,military engineering,aerospace,nonferrous metallurgy and physical research etc.
Electronic SF6 is widely used in TFT-LCD,semiconductor and solar photoelectricity industy ect.
It is a good cleaning gas and etching gas for plasma process.
---------------------------------------------PURITY 99.99% 99.999% Nitrogen < 20 ppm < 5 ppmOxygen < 10 ppm < 3 ppmTotal Hydrocarbons (as CH4) < 5 ppm < 1 ppmHalocaron 14 < 60 ppm < 5 ppmWater < 5 ppm < 3 ppmHydrogen Fluoride < 0.1 ppm < 0.1 ppm Valve Material Brass Brass
---------------------------------------------Molecular Weight: 146.05Specific Volume: 2.65 cf/lb @NTPBoiling Point: -82.7 °F@ 1 AtmCAS No.: 2551-62-4Hazards: SuffocationSafety Data:ACGIH - TLV: 1,000 ppmVapor Pressure Data:Temp, Deg.F Pressure,psia32 184.470 320
Sulfur hexafluoride SF6 gas SF6 gas
