- Contact Person : Mr. Lai Long
- Company Name : Zhuhai Xinhong Electronic Chemical Material Co., Ltd.
- Tel : 86-0756-2125189
- Fax : 86-0756-2125316
- Address : Guangdong,Zhuhai,Room 509, Kehui Building, No. 63, Zijing Road, Xiangzhou District
- Country/Region : China
Nitrogen IC gas
IC gas
Nitrogen
Purity was higher than 99.999%. Colorless odourless off-white coloured non-toxic inert gases. The relative density ds (212 °C, air = 1) 0.967. Gas density 1.153 kg/m3 (212 101.3 °C, kPa); Liquid density 808.5 kg/m3 (195.8 °C, kPa 101.3 -). Boiling point - 195.8 °C. Melting point - 209.9 °C. Nitrogen gas purification methods mainly have adsorption, variable pressure adsorption, membrane separation, etc. In integrated circuits, semiconductor and electric vacuum components manufacturing as protection gas and carrier gas, chemical vapor deposition of carrier gas, liquid when the carry gas diffusion source, in high temperature diffusion furnace of the device used to protect gas. High purity nitrogen in denotation, photolithography, cleaning and evaporation processes, as replacement, drying, storage and transportation by air. Tube manufacturing requirements of nitrogen purity of 99.99% or more.
Nitrogen IC gas
